Hierlemann, Andreas. <br/><br/>
Integrated Chemical Microsensor Systems in CMOS Technology  [electronic resource] / 
by Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann. 
 - Berlin, Heidelberg :  Springer-Verlag Berlin Heidelberg,  2005. 
 - ix, 229 p. :  ill., digital ;  25 cm. 
 - Microtechnology and MEMS,  1615-8326 .
<br/><br/><label>ISBN: </label>9783540273721 (electronic bk.) 9783540237822 (paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Metal oxide semiconductors, Complementary.<br/>Microelectromechanical systems.<br/>Sensorimotor integration.<br/>Chemistry.<br/>Optical and Electronic Materials.<br/>Nanotechnology.<br/>Surfaces and Interfaces, Thin Films.<br/>Electronics and Microelectronics, Instrumentation.<br/>Analytical Chemistry.<br/>Measurement Science, Instrumentation.
<br/><br/><label>LC Class. No.: </label>TK7875  / .H54 2005 
<br/><br/><label>Dewey Class. No.: </label>621.39732