TY  - BOOK
AU  - Fruhauf,Joachim
ED  - SpringerLink (Online service)
TI  - Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures 
SN  - 9783540268765 (electronic bk.)
AV  - QC611.8.S5 F48 2005
U1  - 620.193 22
PY  - 2005///
CY  - Berlin, Heidelberg
PB  - Springer-Verlag Berlin Heidelberg
KW  - Silicon
KW  - Detectors
KW  - Chemistry
KW  - Optical and Electronic Materials
KW  - Ceramics, Glass, Composites, Natural Methods
KW  - Microwaves, RF and Optical Engineering
KW  - Electronics and Microelectronics, Instrumentation
KW  - Industrial Chemistry/Chemical Engineering
UR  - https://eresourcesptsl.ukm.remotexs.co/login?url=http://dx.doi.org/10.1007/b138230
ER  -