Fruhauf, Joachim. <br/><br/>
Shape and Functional Elements of the Bulk Silicon Microtechnique  A Manual of Wet-Etched Silicon Structures /  [electronic resource] : 
by Joachim Fruhauf. 
 - Berlin, Heidelberg :  Springer-Verlag Berlin Heidelberg,  2005. 
 - xii, 221 p. :  ill., digital ;  24 cm. 
<br/><br/><label>ISBN: </label>9783540268765 (electronic bk.) 9783540221098 (paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Silicon.<br/>Detectors.<br/>Chemistry.<br/>Optical and Electronic Materials.<br/>Ceramics, Glass, Composites, Natural Methods.<br/>Microwaves, RF and Optical Engineering.<br/>Electronics and Microelectronics, Instrumentation.<br/>Industrial Chemistry/Chemical Engineering.
<br/><br/><label>LC Class. No.: </label>QC611.8.S5  / F48 2005 
<br/><br/><label>Dewey Class. No.: </label>620.193