High Dielectric Constant Materials VLSI MOSFET Applications / [electronic resource] :
edited by H.R. Huff, D.C. Gilmer.
- Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005.
- xxiv, 710 p. : ill., digital ; 25 cm.
- Springer Series in Advanced Microelectronics, 16 1437-0387 ; .
9783540264620 (electronic bk.) 9783540210818 (paper)
Integrated circuits--Very large scale integration.
Semiconductors.
Gate array circuits--Materials--Congresses.
Dielectrics.
Chemistry.
Optical and Electronic Materials.
Surfaces and Interfaces, Thin Films.
Physics and Applied Physics in Engineering.
Condensed Matter.
TK7874 / .H52414 2005
621.395