Low-G area-changed MEMs accelerometer with bulk silicon technique : design, simulation and testing - Badariah Bais (Bangi : Institut Kejuruteraan Mikro dan Nanoelektronik, Universiti Kebangsaan Malaysia, 2007)
Thesis (Ph.D.) - Universiti Kebangsaan Malaysia, 2007
References : p. [231]-240
Keywords: Universiti Kebangsaan Malaysia -- Dissertations; Dissertations, Academic -- Malaysia; Microelectromechanical systems; Accelerometers