Badariah Bais <br/><br/>
Low-G area-changed MEMs accelerometer with bulk silicon technique :  design, simulation and testing / 
Badariah binti Bais 
 - Bangi :  Institut Kejuruteraan Mikro dan Nanoelektronik, Universiti Kebangsaan Malaysia,  2007 
 - xxxiii , 306 p. :  ill. ;  30 cm. 
<br/><br/>Thesis (Ph.D.) - Universiti Kebangsaan Malaysia, 2007 
<br/><br/>References : p. [231]-240 
<br/><br/><label>ISBN: </label> Hadiah 
<br/><br/><label>Subjects--Corporate Names: </label><br/>Universiti Kebangsaan Malaysia--Dissertations
<br/><br/><label>Subjects--Topical Terms: </label><br/>Dissertations, Academic--Malaysia<br/>Microelectromechanical systems<br/>Accelerometers