TY  - BOOK
AU  - Ganji,Bahram Azizollah
TI  - Design and fabrication of small size and high sensitivity MEMs capacitive microphone
PY  - 2007///
CY  - Bangi
PB  - Institut Kejuruteraan Mikro dan Nanoelektronik, Universiti Kebangsaan Malaysia
KW  - Universiti Kebangsaan Malaysia
KW  - Dissertations
KW  - Microelectromechanical systems
KW  - Microphone
KW  - Dissertations, Academic
KW  - Malaysia
N1  - Thesis (Ph.D) - Universiti Kebangsaan Malaysia, 2007; References : p. [207]-214
ER  -