Design and fabrication of small size and high sensitivity MEMs capacitive microphone - Ganji, Bahram Azizollah (Bangi : Institut Kejuruteraan Mikro dan Nanoelektronik, Universiti Kebangsaan Malaysia, 2007)
Thesis (Ph.D) - Universiti Kebangsaan Malaysia, 2007
References : p. [207]-214
Keywords: Universiti Kebangsaan Malaysia -- Dissertations; Microelectromechanical systems; Microphone; Dissertations, Academic -- Malaysia