Ganji, Bahram Azizollah <br/><br/>
Design and fabrication of small size and high sensitivity MEMs capacitive microphone / 
Bahram Azizollah Ganji 
 - Bangi :  Institut Kejuruteraan Mikro dan Nanoelektronik, Universiti Kebangsaan Malaysia,  2007 
 - xxii , 255 p. :  ill. ;  30 cm. 
<br/><br/>Thesis (Ph.D) - Universiti Kebangsaan Malaysia, 2007 
<br/><br/>References : p. [207]-214 
<br/><br/><label>ISBN: </label> Hadiah 
<br/><br/><label>Subjects--Corporate Names: </label><br/>Universiti Kebangsaan Malaysia--Dissertations
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Microphone<br/>Dissertations, Academic--Malaysia