Gaura, Elena Smart MEMS and sensor systems / Elena Gaura & Robert Newman - London : Singapore ; Hackensack, NJ : Imperial College Press ; Distributed by World Scientific Pub. Co., 2006 - xii, 539 p. : ill. ; 24 cm. Includes bibliographical references and index ISBN: 1860944930 RM448.02 Subjects--Topical Terms: Microelectromechanical systemsSmart structures