TY  - BOOK
AU  - Allen,James J.
TI  - Micro electro mechanical system design
T2  - Mechanical engineering
SN  - 0824758242 (alk. paper)
PY  - 2005///
CY  - Boca Raton
PB  - Taylor & Francis
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Engineering design
N1  - Includes bibliographical references and index
ER  -