TY  - BOOK
AU  - Gad-el-Hak,Mohamed
TI  - The MEMS handbook
T2  - Mechanical engineering series
SN  - 0849391377 (v. 1)
PY  - 2006///
CY  - Boca Raton
PB  - CRC/Taylor & Francis
KW  - Mechanical engineering
KW  - Handbooks, manuals, etc
KW  - Microelectromechanical systems
KW  - Microelectronics
KW  - Nanotechnology
N1  - Includes bibliographical references and index; volume 1; Introduction and fundamentals -; volume 2; Design and fabrication -; volume 3; Applications
ER  -