The MEMS handbook - Gad-el-Hak, Mohamed, 1945- (Boca Raton : CRC/Taylor & Francis, 2006)
volume 1. Introduction and fundamentals - volume 2. Design and fabrication - volume 3. Applications.
Includes bibliographical references and index.
Keywords: Mechanical engineering -- Handbooks, manuals, etc; Microelectromechanical systems; Microelectronics; Nanotechnology