The MEMS handbook / 
edited by Mohamed Gad-el-Hak. 
 - 2nd ed. 
 - Boca Raton :  CRC/Taylor & Francis,  2006. 
 - 3 v. :  ill. ;  26 cm. 
 - Mechanical engineering series. .
<br/><br/>Includes bibliographical references and index. 
<br/><br/> Introduction and fundamentals -  Design and fabrication -  Applications.  volume 1.  volume 2.  volume 3. 
<br/><br/><label>ISBN: </label>0849391377 (v. 1)  RM366.05 0849391385 (v. 2)  RM366.05 0849391393 (v. 3)  RM366.05 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Mechanical engineering--Handbooks, manuals, etc.<br/>Microelectromechanical systems.<br/>Microelectronics.<br/>Nanotechnology.