TY  - BOOK
AU  - Jackson,Mark J.
TI  - Microfabrication and nanomanufacturing
SN  - 0824724313 (hbk.)
PY  - 2006///
CY  - Boca Raton, FL
PB  - CRC/Taylor & Francis
KW  - Microelectronics
KW  - Integrated circuits
KW  - Design and construction
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -