Liu, Chang <br/><br/>
Foundations of MEMS / 
Chang Liu 
 - Upper Saddle River, NJ :  Pearson/Prentice Hall,  2006 
 - xxii, 530 p. :  ill. ;  25 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/>
<br/><br/><label>ISBN: </label>0131472860  RM435.42 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems