TY  - BOOK
AU  - Makabe,T.
AU  - Petrovi{u28EC} Z.
TI  - Plasma electronics: applications in microelectronic device fabrication 
SN  - 0750309768
PY  - 2006///
CY  - New York
PB  - Taylor & Francis
KW  - Plasma engineering
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0653/2005056888-d.html
ER  -