Makabe, T. <br/><br/>
Plasma electronics :  applications in microelectronic device fabrication / 
T. Makabe, Z. Petrovic 
 - New York :  Taylor & Francis,  2006 
 - 339 p. :  ill. ;  25 cm. 
 - Series in plasma physics .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0750309768  RM551.13 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Plasma engineering