TY  - BOOK
AU  - Boussey,Jumana
TI  - Microsystems technology: fabrication, test & reliability 
SN  - 1903996473
AV  - TK7875 .M58 2003
U1  - 621.381 22
PY  - 2003///
CY  - London, Sterling, VA
PB  - Kogan Page Science
KW  - Microelectromechanical systems
UR  - http://www.loc.gov/catdir/toc/ecip046/2003015993.html
ER  -