Microsystems technology :  fabrication, test & reliability / 
edited by Jumana Boussey. 
 - London ;  Sterling, VA :  Kogan Page Science,  2003. 
 - vi, 295 p. :  ill. ;  25 cm. 
<br/><br/><label>ISBN: </label>1903996473 
<br/><br/><label>LCCN: </label>2003-015993 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>LC Class. No.: </label>TK7875  / .M58 2003 
<br/><br/><label>Dewey Class. No.: </label>621.381