Sherer, J. Michael,  1958- <br/><br/>
Semiconductor industry :  wafer fab exhaust management / 
 Wafer fab exhaust management 
J. Michael Sherer 
 - Boca Raton :  CRC/Taylor & Francis,  2005 
 - 194 p. ;  25 cm. 
<br/><br/>Includes bibliographical refrences and index 
<br/><br/><label>ISBN: </label>1574447203 (alk. paper)  RM535.93 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor wafers--Design and construction<br/>Semiconductor industry--Environmental aspects<br/>Volatile organic compounds--Environmental aspects<br/>Air--Purification--Technological innovations