TY  - BOOK
AU  - Brand,Oliver
AU  - Fedder,G.K.
TI  - CMOS - MEMS
SN  - 3527310800
PY  - 2005///
CY  - Weinheim
PB  - Wiley-VCH
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Metal oxide semiconductors, complementary
N1  - Includes index
ER  -