CMOS - MEMS / 
volume editors, O. Brand and G. K. Fedder. 
 - Weinheim :  Wiley-VCH,  2005. 
 - xiv, 596 p. :  ill. ;  25 cm. 
 - Advanced micro & nanosystems ;  vol. 2. .
<br/><br/>Includes index. 
<br/><br/><label>ISBN: </label>3527310800  RM1,005.00 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction.<br/>Metal oxide semiconductors, complementary--Design and construction.