TY  - BOOK
AU  - Kodas,Toivo T.
AU  - Hampden-Smith,Mark J.
TI  - The chemistry of metal CVD
SN  - 3527290710
PY  - 1994///
CY  - Weinheim
PB  - VCH
KW  - Electronic circuit design
KW  - Chemical vapor deposition
KW  - Metallic films
N1  - Bibliography :  p. 417-427
ER  -