TY  - BOOK
AU  - Dabrowski,Jarek
AU  - Weber,Eicke R.
TI  - Predictive simulation of semiconductor processing: status and challenges 
T2  - Springer series in materials science,
SN  - 3540204814 (acid-free paper)
PY  - 2004///
CY  - Berlin
PB  - Springer-Verlag
KW  - Semiconductors
KW  - Simulation methods
KW  - Microelectronics
KW  - Technological innovations
N1  - Includes bibliographical references and index
ER  -