TY  - BOOK
AU  - Wetzig,Klaus
AU  - Schneider,Claus M.
TI  - Metal based thin films for electronics
SN  - 3527403655
PY  - 2003///
CY  - Weinheim
PB  - Wiley-VCH
KW  - Thin films
KW  - Metallic films
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/bios/wiley046/2004297416.html
UR  - http://www.loc.gov/catdir/description/wiley041/2004297416.html
UR  - http://www.loc.gov/catdir/toc/wiley041/2004297416.html
ER  -