May, Gary S. <br/><br/>
Fundamentals of semiconductor fabrication / 
Gary S. May, Simon M. Sze 
 - Wiley international ed. 
 - New York :  Wiley,  2004 
 - xiii, 305 p. :  ill. ;  26 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/>
<br/><br/><label>ISBN: </label>0471232793  RM88.24 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction<br/>Integrated circuits--Design and construction