TY  - BOOK
AU  - Sheats,James R.
AU  - Smith,Bruce W.
TI  - Microlithography: science and technology 
SN  - 0824799534 (hbk.)
PY  - 1998///
CY  - New York
PB  - Marcel Dekker
KW  - Microlithography
KW  - Industrial applications
KW  - Integrated circuits
KW  - Masks
KW  - Metal oxide semiconductors, complementary
KW  - Design and construction
KW  - Manufacturing processes
N1  - Includes bibliographical references and index
ER  -