Microlithography :  science and technology / 
edited by James R. Sheats, Bruce W. Smith 
 - New York :  Marcel Dekker,  1998 
 - xii, 780 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0824799534 (hbk.)  RM703.50 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography--Industrial applications<br/>Integrated circuits--Masks<br/>Metal oxide semiconductors, complementary--Design and construction<br/>Manufacturing processes