TY  - BOOK
AU  - Pelesko,John A.
AU  - Bernstein,David H.
TI  - Modeling MEMS and NEMS
SN  - 1584883065 (alk. paper)
PY  - 2003///
CY  - Boca Raton, FL
PB  - Chapman & Hall/CRC
KW  - Microelectromechanical systems
KW  - Mathematical models
N1  - Includes bibliographical references and i(p. 325-340) and index
ER  -