TY  - BOOK
AU  - Minh,Phan Ngoc
AU  - Takahito,Ono
AU  - Masayoshi,Esashi
TI  - Fabrication of silicon microprobes for optical near-field applications
SN  - 0849311543 (alk. paper)
PY  - 2002///
CY  - Boca Raton, Fla.
PB  - CRC Press
KW  - Micromachining
KW  - Silicon
KW  - Near-field microscopy
KW  - Microprobe analysis
N1  - Includes bibliographical references and index
ER  -