Minh, Phan Ngoc <br/><br/>
Fabrication of silicon microprobes for optical near-field applications / 
Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi 
 - Boca Raton, Fla. :  CRC Press,  2002 
 - 180 p. :  ill. ;  25 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0849311543 (alk. paper)  RM434.86 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Micromachining<br/>Silicon<br/>Near-field microscopy<br/>Microprobe analysis