TY  - BOOK
AU  - Cho,Young-Ho
TI  - Design, fabrication, and optimization of micromechanical flexures
PY  - 1990///
CY  - Berkeley
PB  - University of California
KW  - University of California, Berkeley
KW  - Dissertations
KW  - Micromechanics
KW  - Microelectromechanical systems
KW  - Dissertations, Academic
KW  - United States
N1  - Thesis (Ph.D.) - University of California, Berkeley, 1990; References : p. 100-105
ER  -