Design, fabrication, and optimization of micromechanical flexures /
by Young-Ho Cho
- Berkeley : University of California, 1990
- xvii, 116 p. : ill. ; 18 cm.
Thesis (Ph.D.) - University of California, Berkeley, 1990
References : p. 100-105
RM252.78
University of California, Berkeley--Dissertations
Micromechanics Microelectromechanical systems Dissertations, Academic--United States