TY  - BOOK
AU  - Murarka,S.P.
AU  - Eizenberg,M.
AU  - Sinha,A.K.
TI  - Interlayer dielectrics for semiconductor technologies
SN  - 0125112211
PY  - 2003///
CY  - Amsterdam
PB  - Elsevier/Academic Press
KW  - Dielectrics
KW  - Semiconductors
N1  - Includes index
ER  -