Interlayer dielectrics for semiconductor technologies / 
edited by S. P. Murarka, M. Eizenberg, A. K. Sinha 
 - Amsterdam :  Elsevier/Academic Press,  2003 
 - xiv, 444 p. :  ill. ;  25 cm. 
<br/><br/> Includes index 
<br/><br/><label>ISBN: </label>0125112211  RM743.70 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Dielectrics<br/>Semiconductors