Korvink, J. G. <br/><br/>
Semiconductors for micro and nanotechnology :  an introduction for engineers / 
Jan G. Korvink and Andreas Greiner. 
 - Weinheim :  Wiley-VCH,  2002. 
 - 340 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>3527302573  RM241.20 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Textbooks.<br/>Nanotechnology--Mathematics--Textbooks.<br/>Microtechnology--Mathematics--Textbooks.