Micromachines as tools for nanotechnology / 
H. Fujita (ed.) 
 - Berlin  :  Springer,  2003 
 - xii, 211 :  ill. ;  24 cm. 
 - Microtechnology and MEMS .
<br/><br/>Includes bibliographical references 
<br/><br/><label>ISBN: </label>354000856X  RM399.75 
<br/><br/><label>LCCN: </label>2003-045497 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanotechnology<br/>Microelectromechanical systems