TY  - BOOK
AU  - Schultze,J.Walter
AU  - Osaka,Tetsuya
AU  - Datta,Madhav
TI  - Electrochemical microsystem technologies
SN  - 0415273552
PY  - 2002///
CY  - London
PB  - Taylor & Francis
KW  - Microelectromechanical systems
KW  - Microelectrics
KW  - Electrochemistry, Industrial
ER  -