Electrochemical microsystem technologies / edited by J. Walter Schultze, Tetsuya Osaka and Madhav Datta - London : Taylor & Francis, 2002 - xviii, 569 p. : ill. ; 24 cm. - New trends in electrochemical technology ; volume 2 .

0415273552 RM808.80


Microelectromechanical systems
Microelectrics
Electrochemistry, Industrial