Rebeiz, Gabriel M. <br/><br/>
RF MEMS :  theory, design, and technology / 
Gabriel M. Rebeiz 
 - Hoboken, NJ  :  J. Wiley,  2003 
 - xx, 483 p. :  ill. ;  26 cm. 
<br/><br/> 'A Wiley-Interscience publication.' 
<br/><br/>Includes bibliographical references (p. 477) and index 
<br/><br/><label>ISBN: </label>0471201693 (cloth : alk. paper)  RM381.70 
<br/><br/><label>LCCN: </label>2002-027385 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Very high speed integrated circuits