TY  - BOOK
AU  - Elwenspoek,M.
AU  - Wiegerink,R.
TI  - Mechanical microsensors
SN  - 3540675825
PY  - 2001///
CY  - Berlin
PB  - Springer
KW  - Detectors
KW  - Design and construction
KW  - Microelectromechanical systems
KW  - Transducers
KW  - Silicon
KW  - Micromachining
N1  - Includes bibliographical references and index
ER  -