Elwenspoek, M. <br/><br/>
Mechanical microsensors / 
M. Elwenspoek, R.J. Wiergerink 
 - Berlin :  Springer,  2001 
 - x, 295 p. :  ill. ;  25 cm. 
 - Microtechnology and MEMS .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>3540675825  RM363.20 
<br/><br/><label>LCCN: </label>00-057363 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Detectors--Design and construction<br/>Microelectromechanical systems--Design and construction<br/>Transducers<br/>Silicon<br/>Micromachining