TY - BOOK AU - Gardner,Julian W. AU - Varadan,Vijay K. AU - Awadelkarim,Osama O. TI - Microsensors, MEMS, and smart devices SN - 047186109X (alk. paper) PY - 2001/// CY - Chichester PB - John Wiley & Sons KW - Microelectromechanical systems KW - Detectors KW - Intelligent control systems N1 - Includes bibliographical references and index; Buku bacaan asas fakulti UR - http://www.loc.gov/catdir/toc/onix06/2001024353.html ER -