Microsensors, MEMS, and smart devices - Gardner, Julian W. (Julian W.), 1958-; Varadan, Vijay K., 1943-; Awadelkarim, Osama O. (Chichester : John Wiley & Sons, 2001)
Includes bibliographical references and index.
Buku bacaan asas fakulti.
Keywords: Microelectromechanical systems; Detectors; Intelligent control systems