TY  - BOOK
AU  - Maluf,Nadim
TI  - An introduction to microelectromechanical systems engineering
SN  - 0890065810 (alk. paper)
PY  - 2000///
CY  - Boston
PB  - Artech House
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index; Buku bacaan asas fakulti
ER  -