Maluf, Nadim. <br/><br/>
An introduction to microelectromechanical systems engineering / 
Nadim Maluf. 
 - Boston :  Artech House,  2000. 
 - xix, 265 p. :  ill. ;  24 cm. 
 - Artech House microelectromechanical systems library .
<br/><br/>Includes bibliographical references and index. 
<br/><br/>
<br/><br/><label>ISBN: </label>0890065810 (alk. paper)  RM421.08 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.