TY  - BOOK
AU  - Bowden,M.J.
AU  - Turner,S.Richard
ED  - American Chemical Society.
ED  - American Chemical Society.
TI  - Polymers for high technology: electronics and photonics 
SN  - 0841214069
PY  - 1987///
CY  - Washington, DC
PB  - American Chemical Society
KW  - Polymers
KW  - Congresses
KW  - Photoresists
KW  - Microlithography
KW  - Materials
KW  - Microelectronics
N1  - 'Developed from a symposium sponsored by the Division of Polymeric Materials : Science and Engineering at the 192nd Meeting of the American Chemical Society, Anaheim, California, September 7-12, 1986; Includes bibliographies and indexes
ER  -