Silicon wafer bonding technology for VLSI and MEMS applications / 
edited by Subramanian S. Iyer and Andre J. Auberton-Herve 
 - London :  INSPEC,  2002 
 - xxv, 149 p. :  ill.  26 cm. 
 - EMIS processing series ;  no. 11 .
<br/><br/><label>ISBN: </label>0852960395  RM287.63 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Silicon-on-insulator technology<br/>Integrated circuits--Very large scale integration<br/>Microelectromechanical systems