TY  - BOOK
AU  - Behrisch,R.
AU  - Andersen,H.H.
TI  - Sputtering by particle bombardment
T2  - Topics in applied physics
PY  - 1981///
CY  - Berlin
PB  - Springer-Verlag
KW  - Sputtering (Physics)
KW  - Solids
KW  - Effect of radiation on
KW  - Surfaces (Physics)
N1  - Includes index; Bibliography:  v.1, p.254-256; Contents: 1. Physics and applications
ER  -